2017 Cleanroom technology seminar I

Environmental Solutions Business Development Manager. Edwards Co.(part of Atlas Copco) Visiting professor, Bristol University, UK, School of Chemistry

Mike gained his PhD in Electrical Engineering at Manchester University (UK) in 1982. Starting his professional career with Philips, initially in their UK R D labs & subsequently in the fab in Nijmegen, Holland, Mike has worked in the semiconductor business. He had subsequent marketing roles at UK-based OEMs Cambridge Instruments, VSW and VG Semicon before joining Edwards 21 years ago. He has held various technical and marketing positions before beginning his current role 2 years ago. Mike has numerous published articles and patents to his name, co-chairs a SEMI standards committee, participates in the IRDS, is a UK PFC “expert” on IPCC and has authored chapters on Vacuum and Environmental issues in the forthcoming Semiconductor Manufacturing Handbook.
Mike in 1982, received his doctorate in electrical engineering at Manchester University. He R D laboratory of Philips in the UK began his career, then moved to Nijmegen in the Netherlands related to the laboratory work on semiconductors. 21 years ago he joined the Edwards company. Before he has several OEM companies in the UK doing work related to marketing, including Cambridge instruments, VSW, and VG semiconductor company. In the Edwards company, his current position two years ago, he did a lot of technical and marketing positions. He has published numerous articles and patents. He served as a SEMI (semiconductor equipment and materials International Association) standards Co-Chairperson of the Committee, he had joined the IRDS, he was the IPCC (Intergovernmental Panel on Climate Change, the Intergovernmental Panel on climate change) the PFC's "expert", he has written a forthcoming "Handbook of semiconductor manufacturing" in the section on vacuum and environmental issues.

♣ 講題 Topics: Revision of IPCC Default PFC Emission Factors

The IPCC (the United Nations’ Intergovernmental Panel on Climate Change) published standard default values for the emissions of greenhouse gases (GHGs) in 2006 (2006 IPCC Guidelines for National Greenhouse Gas Inventories,http://www.ipcc-nggip.iges.or.jp/public/2006gl/) for a comprehensive spectrum of sources, ranging from agricultural to industrial sectors. At the 26th Meeting of Task Force Bureau (TFB) (28 – 29 August 2014, Ottawa) it was concluded that to maintain the scientific validity of the 2006 IPCC Guidelines, certain refinements may be required, taking into account scientific and other technical advances that have matured sufficiently since 2006. For instance wetlands emit more methane than previously assumed, and aluminium smelting may emit PFC gases during times between anode events. With this in mind, a task force (Task Force on National Greenhouse Gas Inventories, TFI) has been established to review all available data with a view to publishing a new document in 2019.
The new report will be an update to the 2006 document – and specifically NOT a fundamentally new document – and only where significant new data has come to light will changes be made. A scoping meeting was held in Wollongong in April 2016 and Table of Contents follow-up in Minsk in August, with nominations for authors made by the end of 2016. 2017 is the year of data collection, 2018 is report writing, and 2019 is UN approval (IPCC49) and publication.

Four areas are being considered: Unidentified sources of perfluorocarbons (PFCs), Emissions from soils, Land representation and Emissions from flooded land. Of particular interest to the semiconductor industry will be consideration of the differences between the 2006 IPCC emission factors and the more recent EPA factors and other potential PFC emission sources, such as the manufacture of the PFC gases themselves. I will consider potential impacts for the Taiwanese Semiconductor Industry.
2006年，IPCC公布了溫室氣體(GHGs)的排放標準. (http://www.ipcc-nggip.iges.or.jp/public/2006gl/)And the emissions standards covering most of the area, from construction to industrial aspects are included. In subclause26SessionMeeting of Task Force Bureau(TFB)(2014Year8Month28-29Day, Ottawa) Referred to, in order to maintain2006YearIPCCThe scientific validity of pointers, and taking into account the2006Years of science and technology as well as technology advances, some improvement is necessary. For example, wetlands more than the original estimate of emissions of methane, as well as in smelting aluminum anode event may be dischargedPFCGas. Bearing this in mind, the project group(Task Force on National Greenhouse Gas Inventories, TFI)Have reviewed all the existing data, with a view to2019Published a new document.
A new file will be2006Upgraded version of the paper, Not a new document,Just an important new data.2016Year4Months in theAustraliaTheWollongongScoping meeting was held,8Month in Minsk, Soviet Union discussion list, and2016Submitted by the end of the year the author nominated. ”IPCC Greenhouse gases(GHGs)Emission standards "issue way are as follows: 2017Year is the year of data collection,2018Years is producing annual reports,2019Year is the ratification of the United Nations (IPCC49) And publication year.
The speech in the, talks to four a field: yet was recognition of full fluoride of carbon source (PFCs), and soil of PFC emissions volume (with representative of soil and flood to of of soil), 2006 IPCC emissions standard and update of EPA emissions standard of differences, and other potential of PFC emissions source of, like is PFC gas itself of manufacturing process, these are for semiconductor industrial special interested in of. PFC potential impact factor of Taiwan's semiconductor industry will also be explained.

• Plant high-tech research center at National Taiwan University (High-Tech Facility Research Center NTU)

Professor at the National Taipei University of technology Hu Shizheng (Prof. SC Hu, NTUT)